Magneto-optical properties of yttrium iron garnet (YIG) thin films elaborated by radio frequency sputtering
Magneto-optical properties of yttrium iron garnet (YIG) thin films elaborated by radio frequency sputtering
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DOI：
10.1016/j.jmmm.2004.06.046
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发表时间：
2004-12-01
影响因子：
2.7
通讯作者：
Joisten, H
中科院分区：
文献类型：
--
作者：
Boudiar, T;Payet-Gervy, B;Joisten, H
采用射频磁控无反应溅射法制备钇铁石榴石薄膜。薄膜通过热处理结晶以获得磁光特性。在石英衬底上，观察到的网状裂纹可以用衬底热膨胀系数与YIG的差异来解释。理化分析表明，所得材料具有正确的化学计量，结晶为FCC。用基于透射的经典椭偏系统测量了薄膜的法拉第旋转，得到了0.01度的精度。研究了法拉第旋转的变化，一方面与沉积过程中施加在阴极上的射频功率有关，另一方面与外加磁场有关。并与垂直构型振动样品磁强计分析结果进行了比较。在石英衬底上形成的经740度退火的YIG薄膜，在594 nm波长处最大法拉第旋转为1900度/cm。研究中获得的法拉第旋转系数相对于波长的值与文献中关于块状材料的值相当。为了消除热处理产生的应力，我们在钆镓石榴石（11 11）单晶衬底上制备了一些热膨胀系数接近于YIG的薄膜。这种材料结晶时没有裂纹，法拉第效应是等效的。(C) 2004 Elsevier B.V.版权所有
Thin films of yttrium iron garnet (YIG) are grown by radio frequency magnetron non reactive sputtering system. Thin films are crystallised by heat-treatment to obtain magneto-optical properties. On quartz substrate, the network of cracks observed on the annealed samples can be explained by the difference between the thermal expansion coefficient of substrate and YIG. Physico-chemical analysis shown that the obtained material has a correct stoichiometry and is crystallised as FCC. The Faraday rotation of thin films is measured with a classical ellipsometric system based on transmission which allows us to obtained an accuracy of 0.01degrees. The variation of Faraday rotation is studied on the one hand versus radio frequency power applied to the cathode during the deposition and on the other hand versus the applied magnetic field. The results are compared with those obtained by vibrating sample magnetometer analysis in perpendicular configuration. A maximum Faraday rotation is observed to be 1900degrees/cm at the wavelength of 594 nm for a YIG thin film formed on quartz substrate and annealed at 740degreesC. The values of the Faraday rotation coefficients obtained in the study versus the wavelength are comparable to those of the literature for the bulk material. In order to eliminate the stress due to the heat-treatment, we made some films on single crystals of gadolinium gallium garnet (1 1 1) substrates for which thermal expansion coefficient is near than the YIG one. The material crystallises with no crackles and the Faraday effect is equivalent. (C) 2004 Elsevier B.V. All rights reserved.