Fabrication of discrete track perpendicular media for high recording density
Fabrication of discrete track perpendicular media for high recording density
复制标题
用于高记录密度的离散磁道垂直介质的制造
DOI：
10.1109/tmag.2004.832244
复制
发表时间：
2004
影响因子：
2.1
通讯作者：
M. Matsuzaki
中科院分区：
文献类型：
--
作者：
K. Hattori;K. Ito;Y. Soeno;M. Takai;M. Matsuzaki
研究了垂直各向异性离散轨道介质在高轨道密度条件下的可行性。这些离散的轨道通过沟槽进行物理和磁性分离。采用电子束光刻和干蚀刻工艺制备了离散磁道介质。其中，记录层采用CO-NH3混合气体反应离子刻蚀法刻蚀。通过该工艺，我们获得了一种轨道间距为90 nm的离散磁道介质，而不会损坏磁记录膜或降低其磁性能。为了解决沟槽表面粗糙度引起的飞行不稳定问题，采用干燥工艺获得了类似连续层介质的光滑表面。表面粗糙度Ra小于1 nm。实现了头部滑块在离散轨迹介质光滑表面上类似于连续层介质的飞行稳定性。
The feasibility of discrete track media with perpendicular anisotropy for high track density has been studied. The discrete tracks are separated physically and magnetically by grooves. The discrete track media were fabricated by using an e-beam lithography and dry etching process. In particular, the recording layer was etched using reactive ion etching with CO-NH3 mixed gas. With this process, we obtained a discrete track medium with a track pitch of 90 nm without causing damage to the magnetic recording film or degradation of its magnetic properties. To solve the flying instability issue due to the grooved surface roughness, a smooth surface like continuous layer media was obtained by using only dry processes. The surface roughness (Ra) was below 1 nm. Flying stability of a head-slider on the smooth surface of the discrete track media similar to the continuous layer media has been achieved.