CVD of magnetic iron-cobalt alloy thin films: surface poisoning from carbonyl precursors and use of ammonia as a chemical inhibitor to restore growth kinetics

CVD of magnetic iron-cobalt alloy thin films: surface poisoning from carbonyl precursors and use of ammonia as a chemical inhibitor to restore growth kinetics
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磁性铁钴合金薄膜的 CVD:羰基前体造成的表面中毒以及使用氨作为化学抑制剂来恢复生长动力学

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发表时间:
2016
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通讯作者:
Pengyi Zhang
Pengyi Zhang
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作者:
Pengyi Zhang

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