Technological implementation of a photonic Bier-Glas cavity

Technological implementation of a photonic Bier-Glas cavity
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光子比尔-格拉斯腔的技术实现

DOI:
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发表时间:
2020
影响因子:
3.4
通讯作者:
C. Schneider
C. Schneider
中科院分区:
材料科学3区
文献类型:
--
作者:
J. Jurkat;M. Moczała;Martin Arentoft Jacobsen;Ana Predojevi'c;T. Huber;N. Gregersen;S. Höfling;C. Schneider

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本文介绍了一种新型的量子光子器件,我们称之为光子Bier-Glass腔。我们讨论了它的制造和功能,这是基于集成的In(Ga)As量子点的宽带光子谐振腔的耦合。通过设计,该器件架构独特地将光子微柱结构的珀塞尔增强与垂直锥形波导的宽带光子模式整形相结合,使其成为能够有效提取纠缠光子对的有趣候选者。我们详细介绍了异质结构的外延生长和必要的光刻步骤,以接近GaAs基光子器件的高度超过15 $\mu$m,支持在一个基座上,可以薄至20 nm。我们提出了一个光学特性,这证实了宽带光共振的存在,与放大的单光子自发辐射。
In this paper, we introduce a novel quantum photonic device, which we term photonic Bier-Glass cavity. We discuss its fabrication and functionality, which is based on the coupling of integrated In(Ga)As quantum dots to a broadband photonic cavity resonance. By design, the device architecture uniquely combines the Purcell enhancement of a photonic micropillar structure with broadband photonic mode shaping of a vertical, tapered waveguide, making it an interesting candidate to enable the efficient extraction of entangled photon pairs. We detail the epitaxial growth of the heterostructure and the necessary lithography steps to approach a GaAs-based photonic device with a height exceeding 15 $\mu$m, supported on a pedestal that can be as thin as 20 nm. We present an optical characterization, which confirms the presence of broadband optical resonances, in conjunction with amplified spontaneous emission of single photons.