External force estimation of a piezo-actuated compliant mechanism based on a fractional order hysteresis model
External force estimation of a piezo-actuated compliant mechanism based on a fractional order hysteresis model
复制标题
基于分数阶磁滞模型的压电驱动柔顺机构的外力估计
DOI：
10.1016/j.ymssp.2018.03.012
复制
发表时间：
2018
影响因子：
8.4
通讯作者：
Bian Leixiang
中科院分区：
文献类型：
--
作者：
Zhu Zhiwei;To Suet;Li Yangmin;Zhu Wu Le;Bian Leixiang
在微/纳米定位、微/纳米操纵、微/纳米制造等领域，压电柔顺机构上施加的外力传感在状态监测、过程控制和反馈策略设计中起着关键作用。本文提出了一种力估计策略，即在任意给定的驱动电压作用下，通过比较实际测量的位移和估计的无外力的自由位移来估计力。为了准确预测驱动电压对自由位移的影响，提出了一种改进的分数阶模型。该模型将系统响应分解为一个基本的线性分量和一个非线性滞环分量，然后以修正后的电压信号作为模型输入，用一个普通的分数阶微分模型来描述提取的滞环，从原始电压中提取一个线性时滞分量。以压电式桥式柔顺机构为例，与其他两种差分型滞回模型进行了对比研究，验证了该模型在系统响应建模和外力估计方面的有效性和优越性。
Sensing of external forces applied on piezo-actuated compliant mechanisms plays a key role in state monitoring, process control and feedback strategy design in a variety of fields, including micro-/nanopositioning, micro-/nanomanipulation, and micro-/nanomanufacturing. In this paper, a force estimation strategy is proposed by comparing the practically measured displacement with the estimated free one without external forces, when subjecting to any given actuation voltages. To have an accurate prediction of the free displacement relating to the actuation voltage, an improved fractional order model is proposed. With this model, the system response is decomposed into a basic linear component and a nonlinear hysteresis component, and the extracted hysteresis is then described by an ordinary fractional order differential model using a modified voltage signal as the model input, which extracts a linear time-delay component from the original voltage. Comparative study with other two differential type hysteresis models are experimentally conducted on a piezo-actuated bridge-type compliant mechanism, demonstrating well the effectiveness and superiority of the proposed model for both system response modeling and external force estimation.