Chemical Synthesis of Multilayered Nanostructured Perovskite Thin Films with Dielectric Features for Electric Capacitors
Chemical Synthesis of Multilayered Nanostructured Perovskite Thin Films with Dielectric Features for Electric Capacitors
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用于电容器的具有介电特性的多层纳米结构钙钛矿薄膜的化学合成
DOI：
10.1021/acsanm.7b00310
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发表时间：
2018
影响因子：
5.9
通讯作者：
Chikyow Toyohiro
中科院分区：
文献类型：
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作者：
Zakaria Mohamed Barakat;Nagata Takahiro;Matsuda Asahiko;Yasuhara Yudai;Ogura Atsushi;Hossain Md. Shahriar A.;Billah Motasim;Yamauchi Yusuke;Chikyow Toyohiro
我们报道了一种简单的溶胶-凝胶法制备多层混合薄膜组成的纳米结构的SrTiO 3（STO）和BaTiO 3（BTO）层。采用旋涂法在Si/SiO2/Ti/Pt衬底上制备了STO纳米多孔薄膜。当处理BTO时，BTO在STO晶体孔之间结晶。在STO和BTO表面之间的界面上诱导了显著的应变场。纳米孔的凹形形状可以实现由STO/BTO组成的高度应变的界面异质结构。与纳米结构的STO、BTO和双层STO/BTO膜相比，多层STO/BTO膜显示出最高的介电常数和约280 °C的高居里温度（Tc），这适合于电容器应用。
We report a simple sol–gel method for the preparation of multilayered hybrid thin films composed of nanostructured SrTiO3(STO) and BaTiO3(BTO) layers. A nanoporous thin film of STO is prepared by the spin-coating method on Si/SiO2/Ti/Pt substrate. When the BTO is processed, the BTO is crystallized between STO crystal pores. A significant strain field is induced on the interface between the STO and BTO surfaces. The concave shape of the nanopores could enable the realization of a highly strained interfacial heterostructure composed of STO/BTO. Compared to nanostructured STO, BTO, and bilayer STO/BTO films, multilayered STO/BTO films show the highest dielectric constant and a high Curie temperature (Tc) at around 280 °C, which is suitable for electric capacitor applications.