Surface-Acoustic-Wave Waveguides for Radio Frequency Signal Processing
Surface-Acoustic-Wave Waveguides for Radio Frequency Signal Processing
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DOI：
10.1109/tmtt.2022.3222395
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发表时间：
2023-03
影响因子：
4.3
通讯作者：
Masashi Yamagata;N. Cao;D. John;H. Hashemi
中科院分区：
文献类型：
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作者：
Masashi Yamagata;N. Cao;D. John;H. Hashemi
电磁波的大速度使得在射频（RF）处的波导结构（诸如耦合器和延迟线）的设计对于芯片级实现而言过大。相比之下，声波的速度要小很多个数量级。因此，通过使用声波，RF波导成为可能。本文研究了128° Y切铌酸锂（LiNbO_3）表面声波（SAW）的波导特性，包括直波导、弯曲波导和耦合波导。在此基础上，提出了一种基于128° Y切LiNbO_3键合硅基声表面波波导的电声可变移相器。最后，一个全声波双向射频相控阵前端演示。在这项工作中所示的结构可以实现在商业SAW代工，从而在低成本的SAW微波信号处理结构紧凑的实现。
The large velocity of electromagnetic waves makes the design of waveguide structures such as couplers and delay lines at radio frequencies (RFs) prohibitively large for chip-scale implementation. In contrast, acoustic waves have velocities that are many orders of magnitude smaller. Thus, with the use of acoustic waves, RF waveguides become possible. In this article, the waveguiding of sub-1-GHz surface acoustic waves (SAWs) on 128° Y-cut lithium niobate (LiNbO3) is examined with demonstrations of straight waveguides, waveguide bends, and coupled waveguides. Furthermore, an electroacoustic variable phase shifter based on an SAW waveguide on a bonded 128° Y-cut LiNbO3 on silicon is demonstrated. Finally, an all-acoustic bidirectional RF phased array front end is demonstrated. The structures shown in this work can be implemented in commercial SAW foundries resulting in low-cost compact realizations of SAW microwave signal processing structures.