Effect of substrate offcut angle on BGaN epitaxial growth
Effect of substrate offcut angle on BGaN epitaxial growth
复制标题
衬底切割角对BGaN外延生长的影响
DOI:
10.7567/jjap.55.05fd05
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发表时间:
2016
影响因子:
1.5
通讯作者:
and Takayuki Nakano
中科院分区:
文献类型:
--
作者:
Kohei Ueyama;Hidenori Mimura;Yoku Inoue;Toru Aoki;and Takayuki Nakano