CHARACTERIZATION OF DIAMOND-LIKE CARBON BY INFRARED-SPECTROSCOPY

CHARACTERIZATION OF DIAMOND-LIKE CARBON BY INFRARED-SPECTROSCOPY
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DOI:
10.1063/1.107098
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发表时间:
1992-04-27
影响因子:
4
通讯作者:
PATEL, V
PATEL, V
中科院分区:
物理与天体物理2区
文献类型:
--
作者:
GRILL, A;PATEL, V

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傅里叶变换红外光谱(FTIR)、高分辨率C-13核磁共振光谱和前向反冲弹性散射(FRES)测氢法的比较表明,FTIR不能用于确定类金刚石薄膜的碳杂化或总氢含量。FTIR吸收只反映DLC中的光学活性氢,与FRES一起使用,可以提供薄膜中包含的自由氢的估计。未结合氢的分数可达到约50%的值。
Comparison of Fourier transform infrared (FTIR) absorption spectroscopy, high resolution C-13 nuclear magnetic resonance spectroscopy, and hydrogen evaluation by forward recoil elastic scattering (FRES) measurements shows that FTIR cannot be used to determine the carbon hybridization or total hydrogen content of diamondlike carbon films (DLC). FTIR absorption reflects only the optically active hydrogen in the DLC and, using it together with FRES, it can provide an estimate of the unbound hydrogen contained in the films. The fraction of unbound hydrogen can reach values of up to approximately 50%.