Study on the Surface Quality of Optical Glass in Ultrasonic-Magnetorheological Compound Finishing
Study on the Surface Quality of Optical Glass in Ultrasonic-Magnetorheological Compound Finishing
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DOI：
10.4028/www.scientific.net/kem.389-390.181
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发表时间：
2008-09
期刊：
影响因子：
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通讯作者：
Fei-hu Zhang;Hui Wang;Jian Feng Liu;D. Luan;Y. Zhang
中科院分区：
文献类型：
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作者：
Fei-hu Zhang;Hui Wang;Jian Feng Liu;D. Luan;Y. Zhang
介绍了一种新的光学抛光方法-超声-磁流变复合抛光（UMC）。介绍了超分子整理的机理。对K9光学玻璃超微细光整加工的表面质量进行了试验研究。结果表明，光学玻璃的表面粗糙度Ra为4.0nm。通过实验得出了主要工艺参数对光学玻璃表面粗糙度的影响规律。该研究将为进一步研究UMC整理技术奠定基础。
The paper presents a newly developed optical polishing method, Ultrasonic-magnetorheological compound finishing (UMC finishing). The mechanism of UMC finishing is introduced in the paper. Experiments are carried out to study the surface quality of the optical glass K9 in UMC finishing. The result shows that the surface roughness Ra of the optical glass is 4.0nm, which is measured by the profile meter. The rules of surface roughness for optical glass by the main processing parameters are also acquired by the experiments. The study will be the basis for the further study of UMC finishing technology.