Nanotribology and nanomechanics of MEMS/NEMS and BioMEMS/BioNEMS materials and devices
Nanotribology and nanomechanics of MEMS/NEMS and BioMEMS/BioNEMS materials and devices
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DOI：
10.1016/j.mee.2006.10.059
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发表时间：
2007-03-01
影响因子：
2.3
通讯作者：
Bhushan, Bharat
中科院分区：
文献类型：
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作者：
Bhushan, Bharat
微/纳机电系统（MEMS/NEMS）需要被设计为通常在毫秒到皮秒范围内执行预期功能。高速接触器件的预期寿命可能从几十万次到数十亿次循环不等，例如数字微镜器件（DMDs）超过一千亿次循环，这对材料提出了严格要求。对于生物微机电系统/生物纳机电系统，生物分子层与基底之间的粘附以及生物层的摩擦和磨损可能很重要。需要对粘附、摩擦/静摩擦、磨损以及表面污染和环境的作用有一个基本的了解。众所周知，大多数机械性能是与尺寸相关的。因此，需要测量纳米尺度结构的性能。微机电系统/纳机电系统材料需要在微/纳米尺度上表现出良好的机械和摩擦学性能。需要开发润滑剂并确定适合微机电系统/纳机电系统的润滑方法。需要开发方法来增强生物分子与器件基底之间的粘附。需要进行部件级研究，以便更好地理解微机电系统/纳机电系统中出现的摩擦学现象。微/纳米摩擦学和基于原子力显微镜的技术的出现为研究人员提供了一种解决这些问题的可行方法。本文综述了微/纳米尺度的材料粘附、摩擦和磨损研究以及微机电系统/纳机电系统和生物微机电系统/生物纳机电系统的润滑研究，以及微机电系统/纳机电系统器件中静摩擦现象的部件级研究。（c）2006爱思唯尔有限公司。保留所有权利。
The micro/nanoelectromechanical systems (MEMS/NEMS) need to be designed to perform expected functions typically in millisecond to picosecond range. Expected life of the devices for high speed contacts can vary from few hundred thousand to many billions of cycles, e.g., over a hundred billion cycles for digital micromirror devices (DMDs), which puts serious requirements on materials. For BioMEMS/BioNEMS, adhesion between biological molecular layers and the substrate, and friction and wear of biological layers may be important. There is a need for development of a fundamental understanding of adhesion, friction/stiction, wear, and the role of surface contamination, and environment. Most mechanical properties are known to be scale dependent. Therefore, the properties of nanoscale structures need to be measured. MEMS/NEMS materials need to exhibit good mechanical and tribological properties on the micro/nanoscale. There is a need to develop lubricants and identify lubrication methods that are suitable for MEMS/NEMS. Methods need to be developed to enhance adhesion between biomolecules and the device substrate. Component-level studies are required to provide a better understanding of the tribological phenomena occurring in MEMS/NEMS. The emergence of micro/nanotribology and atomic force microscopy-based techniques has provided researchers a viable approach to address these problems. This paper presents a review of rriicro/nanoscale adhesion, friction, and wear studies of materials and lubrication studies for MEMS/NEMS and BioMEMS/BioNEMS, and component-level studies of stiction phenomena in MEMS/NEMS devices. (c) 2006 Elsevier B.V. All rights reserved.