Thermal diffusivity measurement of a thin metal film with a picosecond thermoreflectance technique
Thermal diffusivity measurement of a thin metal film with a picosecond thermoreflectance technique
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采用皮秒热反射技术测量金属薄膜的热扩散率
DOI：
10.1068/htwu125
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发表时间：
2002
影响因子：
1.1
通讯作者：
A. Ono
中科院分区：
文献类型：
--
作者：
N. Taketoshi;T. Baba;A. Ono
对国家计量科学研究室的皮秒热反射测量系统进行了改进，引入了“后加热/前探测”结构。后加热/前探测和传统的前加热/前探测热反射信号可以观察到沉积在透明基板上的薄膜。给出了温度响应的解析解。它考虑了加热束和探测束的穿透深度，并基于响应函数法推导。将这些分析应用于沉积在Pyrex 7740玻璃衬底上的标称100 nm厚的铝薄膜。从正面加热/正面探测热反射信号计算的热扩散率比散装铝的热扩散率小30%。从后部加热/前部探测热反射信号计算的热扩散率比散装铝的热扩散率小6.2%。
A picosecond thermoreflectance measurement system in the National Research Laboratory of Metrology has been improved by introducing a 'rear heating/front probing'configuration. Both rear heating/front probing and conventional front heating/front probing thermoreflectance signals can be observed for thin films deposited on transparent substrates. The analytical solution of the temperature response is presented. It considers the penetration depth of a heating beam and a probe beam, and is derived based on the response function method. These analyses were applied to an aluminium thin film, nominally 100 nm thick, deposited on a Pyrex 7740 glass substrate. The thermal diffusivity calculated from the front heating/front probing thermoreflectance signal is 30% smaller than that of the bulk aluminium. The thermal diffusivity calculated from the rear heating/front probing thermoreflectance signal is 6.2% smaller than that of the bulk aluminium.