Servo scanning 3D micro EDM for array micro cavities using on-machine fabricated tool electrodes
Servo scanning 3D micro EDM for array micro cavities using on-machine fabricated tool electrodes
复制标题
DOI：
10.1088/1361-6439/aaa04b
复制
发表时间：
2018-01
影响因子：
2.3
通讯作者：
H. Tong;Yong Li;Long Zhang
中科院分区：
文献类型：
--
作者：
H. Tong;Yong Li;Long Zhang
阵列微腔在微模具、光学器件、生物芯片等领域有着广泛的应用。阵列伺服扫描微电火花加工（EDM）采用截面形状简单的阵列微电极，具有批量加工复杂三维微腔的优势。本文重点分析了离线加工阵列微电极引起的加工误差，提出了一种基于在线加工阵列微电极的阵列伺服扫描微细电火花加工工艺。阵列微电极是通过线材电火花磨削、阵列反向复制和电极端面修整等组合工艺在机器上制备的。得到直径Φ80µm、长度600µm的九列工具电极。此外，通过多次加工实验验证了所提出的工艺，可以实现上边长为300µm，下边长为150µm，深度为112µm或120µm的九列六角形微腔。在实验中，在黄铜工件、铜电极和去离子水介质的条件下，在电极尖端上形成了像机械加工中堆积的边缘一样的切屑驼峰。用油介质代替水介质可以避免堆积的驼峰。
Array micro cavities are useful in many fields including in micro molds, optical devices, biochips and so on. Array servo scanning micro electro discharge machining (EDM), using array micro electrodes with simple cross-sectional shape, has the advantage of machining complex 3D micro cavities in batches. In this paper, the machining errors caused by offline-fabricated array micro electrodes are analyzed in particular, and then a machining process of array servo scanning micro EDM is proposed by using on-machine fabricated array micro electrodes. The array micro electrodes are fabricated on-machine by combined procedures including wire electro discharge grinding, array reverse copying and electrode end trimming. Nine-array tool electrodes with Φ80 µm diameter and 600 µm length are obtained. Furthermore, the proposed process is verified by several machining experiments for achieving nine-array hexagonal micro cavities with top side length of 300 µm, bottom side length of 150 µm, and depth of 112 µm or 120 µm. In the experiments, a chip hump accumulates on the electrode tips like the built-up edge in mechanical machining under the conditions of brass workpieces, copper electrodes and the dielectric of deionized water. The accumulated hump can be avoided by replacing the water dielectric by an oil dielectric.