Ultra-wideband surface acoustic wave resonator employing Pb(In1/2Nb1/2)O3-Pb(Mg1/3Nb2/3)O3-PbTiO3 crystals
Ultra-wideband surface acoustic wave resonator employing Pb(In1/2Nb1/2)O3-Pb(Mg1/3Nb2/3)O3-PbTiO3 crystals
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DOI：
10.1063/1.3675908
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发表时间：
2012-01
影响因子：
4
通讯作者：
J. Chen;Jian-song Liu;K. Hashimoto;T. Omori;C. Ahn;Xiangyong Zhao;Haosu Luo
中科院分区：
文献类型：
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作者：
J. Chen;Jian-song Liu;K. Hashimoto;T. Omori;C. Ahn;Xiangyong Zhao;Haosu Luo
理论分析表明，在Y切X传播Pb（In 1/2Nb 1/2）O3-Pb（Mg 1/3 Nb 2/3）O3-PbTiO 3（YX-PIN-PMN-PT）基片上可以实现具有极大机电耦合系数K2的高性能声表面波谐振器。设计、制作了一种基于Cu光栅/YX-PIN-PMN-PT基片结构的单端口SAW谐振器。实验结果表明，57.3%的非常大的K2是可以实现的。如此大的K2使得PIN-PMN-PT单晶在实现宽带SAW滤波器和可调谐SAW滤波器方面具有巨大的潜力。讨论了畴结构的不均匀性和不稳定性对器件性能的影响。
Theoretical analysis showed that high performance surface acoustic wave (SAW) resonator with an extremely large electromechanical coupling factor K2 could be realized on Y cut X propagating Pb(In1/2Nb1/2)O3-Pb(Mg1/3Nb2/3)O3-PbTiO3 (YX-PIN-PMN-PT) substrate. A one-port SAW resonator was designed, fabricated, and characterized on Cu-grating/YX-PIN-PMN-PT substrate structure. The experimental results demonstrate that very large K2 of 57.3% is realizable. Such an extremely large K2 makes PIN-PMN-PT single crystal great potential for realizing wideband SAW filters and tunable SAW filters. The influence of inhomogeneity and instability of the domain structure on the fabricated resonators has been discussed thoroughly for further improvement of the devices.