Absolute length measurement of prismatic bodies with PTB´s new double-ended interferometer under the influence of wavefront aberrations
Absolute length measurement of prismatic bodies with PTB´s new double-ended interferometer under the influence of wavefront aberrations
复制标题
在波前像差影响下使用 PTB 新型双端干涉仪测量棱柱体的绝对长度
DOI：
10.7795/810.20150616k
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发表时间：
2015
期刊：
影响因子：
--
通讯作者：
R. Schödel
中科院分区：
文献类型：
--
作者：
K. Rau;T. Mai;R. Schödel
长度测量到国际单位制(SI)的可追溯性可以通过使用光学干涉测量来实现。本文介绍了́S新型双端干涉仪，它通过分析两组同时测量的相对边的干涉图来确定棱柱体(如量块)的绝对长度。不需要像在传统的量块比较器中使用的那样，将量块拧到压盘上以形成光学台阶。反过来，由于较大的光路长度，波前像差对测量长度的影响增加。本文提出了一种修正方法的初步设想。
Traceability of length measurements to the international system of units (SI) can be realized by using optical interferometry. This paper describes PTB ́s new double-ended interferometer, which is used to determine the absolute length of prismatic bodies (e.g. gauge blocks) from the analysis of two sets of interferograms measured simultaneously on opposite sides. Wringing the gauge block to a platen to form an optical step, as it is used in traditional gauge block comparators, is not required. In return, the influence of wavefront aberrations on the measured length is increased due to larger optical path lengths. A first idea for a correction method is presented in this paper.