Measurements of air flow characteristics in a full-scale clean room
Measurements of air flow characteristics in a full-scale clean room
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DOI：
10.1016/0360-1323(95)00039-9
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发表时间：
1996-03-01
影响因子：
7.4
通讯作者：
Liu, CJ
中科院分区：
文献类型：
--
作者：
Hu, SC;Wu, YY;Liu, CJ
详细的空气湍流特性在一个完整的规模和运行的风机过滤单元型洁净室（4.20米× 2.97米× 2.70米）与无净工作台加载进行了实验研究。利用三维超声风速仪对气流速度的三个分量进行了测量。给出了速度矢量、湍流强度、湍流动能以及速度方向和速度等值线的概率密度函数。计算结果表明，气流速度的不均匀性和偏转角分别在13%和7.9 °以内。此外，气流的平均流型，湍流特性，和直方图特征进行了讨论。详细的实验数据不仅对洁净室的设计和设备布局有帮助，而且对洁净室流场数值模拟的评价也有帮助。
Detailed air turbulence characteristics in a full-scale and running fan-filter unit type clean room (4.20 m x 2.97 m x 2.70 m) with and without a clean bench loaded are investigated experimentally. The measurements of the three components of air velocity were conducted by means of a three-dimensional ultrasonic anemometer. Velocity vectors, turbulence intensity, turbulence kinetic energy, and probability density functions of velocity direction and velocity contours in the space domain are presented The results show that the non-uniformity and deflection angle of air velocity are within 13% and 7.9 degrees, respectively. Moreover, the mean flow patterns, turbulence characteristics, and histogram features of the air flow are discussed. The detailed experimental data are not only useful for clean room design and equipment layout but also helpful for use in the evaluation of numerical modeling in clean room flow fields.