Pulse Breakdown in Sub-20 nm Organic Dielectrics for Nanoscale-Electromachining (nano-EM)
Pulse Breakdown in Sub-20 nm Organic Dielectrics for Nanoscale-Electromachining (nano-EM)
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DOI：
10.1115/1.4001718
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发表时间：
2010-06
影响因子：
4
通讯作者：
K. Virwani;A. Malshe;K. Rajurkar
中科院分区：
文献类型：
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作者：
K. Virwani;A. Malshe;K. Rajurkar
纳米电加工（nano-EM）是一种在有机溶剂（正癸烷C10 H22和正十一烷C12 H26）中跨20 nm以下的工具-工件间隙施加电场的工艺，用于在导电材料中产生纳米尺寸特征（8-80 nm）。为了提高纳米电磁加工的速度，研究了脉冲击穿现象的利用。脉冲击穿的Paschen曲线的线性行为证明了脉冲纳米EM过程的可预测性。加工间隙中的放电电流在后击穿区呈指数衰减规律，并有一定的延迟。电流恢复的这种延迟可能会限制纳米EM生产速度的提高，并表明需要外部加压介电流超过自我引导扩散。其他显着的效果，如吸附压缩有限的电介质扩散和恢复电流的变化与工具工件间隙沿着与它们的工程意义进行了讨论。
Nano-electromachining (nano-EM) is a process in which electric fields applied across sub-20 nm tool-workpiece gaps in organic dielectrics (n-decane C 10 H 22 and n-undecane C 12 H 26 ) are used to produce nanometer size features (8-80 nm) in electrically conductive materials. In order to improve the speed of nano-EM for manufacturing, utilization of pulse breakdown phenomena is studied. Linear behavior of Paschen curves for pulse breakdown demonstrated the predictability of pulse nano-EM process. The discharge current in the machining gap showed exponential decay behavior in the post-breakdown regime with certain delay. This delay in current recovery may present a limit to improving nano-EM production speeds and suggests a need for external pressurized dielectric flow over self guided diffusion. Other notable effects such as adsorption compression limited dielectric diffusion and the variation in the recovery current with the tool-workpiece gap along with their engineering implications are discussed.