A strategy of finely optimizing WOX electrochromic layers for application in flexible ATF-ECDs
A strategy of finely optimizing WOX electrochromic layers for application in flexible ATF-ECDs
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DOI：
10.1016/j.electacta.2021.139669
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发表时间：
2021-12
影响因子：
6.6
通讯作者：
Rui Wang;Han Lin;Hongbing Zhu;M. Wan;K. Shen;Y. Mai
中科院分区：
文献类型：
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作者：
Rui Wang;Han Lin;Hongbing Zhu;M. Wan;K. Shen;Y. Mai
在本研究中，通过反应磁控溅射在不同氧气（O2）通量下制备氧化钨（WOX）薄膜，用于器件配置为PET/ITO/NiOX/Ta2O5/WOX/ITO的柔性全薄膜电致变色器件（ATF-ECD）。靶材电压与 O2flux 曲线呈现出两个溅射模式区域，其中不同的靶材电压反映了特定的靶材表面状态。在4.5 sccm的O2通量下沉积的WOX薄膜位于达到最大目标电压的起始点，表现出非晶结构、相对疏松的形貌、适当的化学成分、高透光率和最佳的电化学性能。相应的柔性 ATF-ECD 具有出色的电致变色性能，在漂白和着色步骤中具有高达 70% 的高光调制、快速响应时间和最高的着色效率。
In this study, tungsten oxide (WOX) thin films were prepared by reactive magnetron sputtering at different oxygen (O2) fluxes for application in flexible all-thin-film electrochromic devices (ATF-ECDs) with a device configuration of PET/ITO/NiOX/Ta2O5/WOX/ITO. The target voltage vs. O2flux curve presents two sputtering mode zones, where distinct target voltages reflect the specific target surface states. The WOXthin film deposited at the O2flux of 4.5 sccm, which sites at the onset point reaching to the maximal target voltage, exhibits amorphous structure, relatively loose morphology, proper chemical compositions, high light transmittance and best electrochemical properties. The corresponding flexible ATF-ECD performs excellent electrochromic performances with high light modulation of up to 70%, fast response time and the highest coloration efficiencies at both bleaching and coloring steps.