New perspectives on nano-engineering by secondary electron spectroscopy in the helium ion and scanning electron microscope
New perspectives on nano-engineering by secondary electron spectroscopy in the helium ion and scanning electron microscope
复制标题
DOI：
10.1557/mrc.2018.75
复制
发表时间：
2018-06-01
影响因子：
1.9
通讯作者：
Rodenburg, Cornelia
中科院分区：
文献类型：
--
作者：
Stehling, Nicola;Masters, Robert;Rodenburg, Cornelia
氦离子显微镜（HeIM）为纳米工程和成像提供了巨大的希望，并可用于原位化学分析。在这里，我们将探讨潜在的二次电子高光谱成像（SEHI）作为一种新的途径，探索在二维和三维的化学变化。我们提出了一系列的早期应用的背景下，图像解释在更广泛的材料科学和过程控制的离子束为基础的纳米工程。SEHI在HeIM演变成一个可靠的技术，可以完全嵌入到纳米工程工作流程的必要步骤被认为是。
The helium ion microscope (HeIM) holds immense promise for nano-engineering and imaging with scope for in-situ chemical analysis. Here we will examine the potential of secondary electron hyperspectral imaging (SEHI) as a new route to exploring chemical variations in both two and three dimensions. We present a range of early applications in the context of image interpretation in wider materials science and process control in ion beam-based nano-engineering. Necessary steps for SEHI in the HeIM to evolve into a reliable technique which can be fully embedded into nano-engineering workflows are considered.