Water window ptychographic imaging with characterized coherent X-rays
Water window ptychographic imaging with characterized coherent X-rays
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DOI：
10.1107/s1600577515005524
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发表时间：
2015-05-01
影响因子：
2.5
通讯作者：
Vartanyants, Ivan
中科院分区：
文献类型：
--
作者：
Rose, Max;Skopintsev, Petr;Vartanyants, Ivan
报道了在水窗中使用 500 eV 聚焦软 X 射线进行的叠层相干衍射成像实验。选择具有高度相干性的X射线束在PETRA III同步辐射源的P04束线上进行叠层记录。采用新开发的非冗余阵列法测量光束相干性，测得垂直方向出口狭缝开口100μm处的相干长度为4.1μm，整体相干度为35％。尺寸为 2.6 μm 的针孔选择了光束的相干部分，用于获得光刻制造的测试样本和硅藻化石的叠层印刷重建结果。测试样品所达到的分辨率为 53 nm，仅受检测器尺寸的限制。硅藻的成像分辨率优于 90 nm。
A ptychographical coherent diffractive imaging experiment in the water window with focused soft X-rays at 500 eV is reported. An X-ray beam with high degree of coherence was selected for ptychography at the P04 beamline of PETRA III synchrotron radiation source. The beam coherence was measured with the newly developed non-redundant array method, and a coherence length of 4.1 mu m and global degree of coherence of 35% at 100 mu m exit slit opening in the vertical direction were determined. A pinhole, 2.6 mu m in size, selected the coherent part of the beam that was used to obtain ptychographic reconstruction results of a lithographically manufactured test sample and a fossil diatom. The achieved resolution was 53 nm for the test sample and was only limited by the size of the detector. The diatom was imaged at a resolution better than 90 nm.