Fabrication of a miniature twin-fuel-cell on silicon wafer
Fabrication of a miniature twin-fuel-cell on silicon wafer
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DOI：
10.1016/s0013-4686(03)00034-3
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发表时间：
2003-05
影响因子：
6.6
通讯作者：
Jingrong Yu;P. Cheng;Zhiqi Ma;B. Yi
中科院分区：
文献类型：
--
作者：
Jingrong Yu;P. Cheng;Zhiqi Ma;B. Yi
本文介绍了一种硅基微型双燃料电池的制作和性能评价。微型双燃料电池是串联制造的，使用两个膜电极组件夹在两个硅衬底之间，电流，反应物和产物在其中流动。微型双燃料电池的新颖结构是将一个电池的阴极与另一个电池的阳极电连接在同一平面上。通过在硅晶片顶部的金层上溅射铜层来制造互连。二氧化硅沉积在硅晶片上邻近铜层以防止双电池之间的短路。通过从晶片的背面和正面进行各向异性硅蚀刻，以二氧化硅作为本征蚀刻停止层，在硅晶片中制备进料孔和通道。在25°C和大气压下以干燥的H2/O2操作，对于使用Nafion 112膜的微型双燃料电池，在270 mA/cm 2下测得的峰值功率密度为190.4 mW/cm 2。基于双燃料电池和两个单电池的极化曲线，计算出双电池之间的互连电阻在0.0113 Ω（在10 mA/cm 2）至0.0150 Ω（在300 mA/cm 2）的范围内，这是相对较低的。
The fabrication and performance evaluation of a miniature twin-fuel-cell on silicon wafers are presented in this paper. The miniature twin-fuel-cell was fabricated in series using two membrane-electrode-assemblies sandwiched between two silicon substrates in which electric current, reactant, and product flow. The novel structure of the miniature twin-fuel-cell is that the electricity interconnect from the cathode of one cell to the anode of another cell is made on the same plane. The interconnect was fabricated by sputtering a layer of copper over a layer of gold on the top of the silicon wafer. Silicon dioxide was deposited on the silicon wafer adjacent to the copper layer to prevent short-circuiting between the twin cells. The feed holes and channels in the silicon wafers were prepared by anisotropic silicon etching from the back and front of the wafer with silicon dioxide acting as intrinsic etch-stop layer. Operating on dry H2/O2at 25°C and atmospheric pressure, the measured peak power density was 190.4 mW/cm2at 270 mA/cm2for the miniature twin-fuel-cell using a Nafion 112 membrane. Based on the polarization curves of the twin-fuel-cell and the two single cells, the interconnect resistance between the twin cells was calculated to be in the range from 0.0113 Ω (at 10 mA/cm2) to 0.0150 Ω (at 300 mA/cm2), which is relatively low.