A multiple-beam tuning-fork gyroscope with high quality factors
A multiple-beam tuning-fork gyroscope with high quality factors
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DOI：
10.1016/j.sna.2010.12.024
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发表时间：
2011-03-01
影响因子：
4.6
通讯作者：
Hao, Zhili
中科院分区：
文献类型：
--
作者：
Wang, Ren;Cheng, Peng;Hao, Zhili
本文介绍了一种多波束音叉陀螺的设计、理论分析、制作和实验结果。基于热弹性阻尼的数值模型，设计了一种在两种工作模式下都具有高品质因数Q（s）的多梁音叉结构。对MB-TFG设计进行了全面的理论分析，以将设计参数与其操作参数以及进一步的性能参数联系起来。结合通过沟槽限定器件以减轻先前识别的对锚损耗的严重制造影响的掩模，采用简单的单掩模制造工艺来在绝缘体上硅晶片上实现这种MB-TFG设计。所制作的MB-TFG的实验结果与理论分析进行了全面的比较，以获得准确的解释。在真空中制造的MB-TFG的最高测量Q（s）在驱动模式下为255，000，在感测模式下为103，000，频率为15.7 kHz。在两种模式之间的频率差为4 Hz（工作频率为16.8 kHz）和驱动模式振幅为3.0 μ m的情况下，测得的速率灵敏度为80 μ V-PP/度/s，等效阻抗为2.5 M Ω。该器件的计算总速率分辨率为0.37度/h/根Hz，而测得的角度随机游走（ARW）和偏置不稳定性分别为6.67度/根h和95度/h。由爱思唯尔公司出版
This paper presents the design, theoretical analysis, fabrication, and experimental results of a multiple-beam tuning-fork gyroscope (MB-TFG). Based on a numerical model of thermoelastic damping, a multiple-beam tuning-fork structure is designed with high quality factors (Q(s)) in its two operation modes. A comprehensive theoretical analysis of the MB-TFG design is conducted to relate the design parameters to its operation parameters and further performance parameters. In conjunction with a mask that defines the device through trenches to alleviate previously identified severe fabrication effect on anchor loss, a simple one-mask fabrication process is employed to implement this MB-TFG design on silicon-on-insulator wafers. Experimental results of the fabricated MB-TFGs are thoroughly compared with the theoretical analysis for accurate interpretation. The highest measured Q(s) of the fabricated MB-TFGs in vacuum are 255,000 in the drive-mode and 103,000 in the sense-mode, at a frequency of 15.7 kHz. Under a frequency difference of 4 Hz between the two modes (operation frequency is 16.8 kHz) and a drive-mode vibration amplitude of 3.0 mu m, the measured rate sensitivity is 80 mu V-PP/degrees/s with an equivalent impedance of 2.5 M Omega. The calculated overall rate resolution of this device is 0.37 degrees/h/root Hz, while the measured angle random walk (ARW) and bias instability are 6.67 degrees/root h and 95 degrees/h, respectively. Published by Elsevier B.V.