Intrinsic sheath edge conditions for sheath instability in low-pressure electronegative plasmas
Intrinsic sheath edge conditions for sheath instability in low-pressure electronegative plasmas
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低压负电等离子体中鞘层不稳定性的固有鞘层边缘条件
DOI：
10.1088/0022-3727/36/5/308
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发表时间：
2003
期刊：
影响因子：
--
通讯作者：
A. Kono
中科院分区：
文献类型：
--
作者：
A. Kono
鞘层边缘可能导致等离子体不稳定的条件？在低压电负性等离子体的壁边界被认为是在一个全面的方式。在流体模型的基础上推导出鞘层边缘的负离子密度与电子密度之比的相关范围，并阐明了参数范围是如何受正离子温度、负离子温度、鞘层厚度等因素的影响。等离子体的几何形状（平行平面、圆柱形和球形）、正离子流的方向（会聚或发散）以及电离和动量转移碰撞的影响。有人发现，在任何几何形状的不稳定性将引起的条件下，可以实现没有困难的低压等离子体。
The conditions at the sheath edge that could lead to instability in the plasma?wall boundary in low-pressure electronegative plasmas are considered in a comprehensive manner. The relevant range of the ratio of the negative ion density to the electron density at the sheath edge was derived on the basis of a fluid model and it was clarified how the parameter range are affected by the positive and negative ion temperatures, by the?geometries of plasmas (plane-parallel, cylindrical, and spherical), by the directions of the positive ion flow (converging or diverging), and by the effects of ionization and momentum transfer collisions. It was found that in any geometry the instability would be induced in conditions that could be realized without difficulty in low-pressure plasmas.