Femtosecond laser micro-structuring of alumina ceramic
Femtosecond laser micro-structuring of alumina ceramic
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DOI：
10.1016/j.apsusc.2005.03.005
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发表时间：
2005-07
影响因子：
6.7
通讯作者：
W. Perrie;A. Rushton;M. Gill;P. Fox;W. O'Neill
中科院分区：
文献类型：
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作者：
W. Perrie;A. Rushton;M. Gill;P. Fox;W. O'Neill
利用180 fs，λ= 775 nm的光脉冲，在1.4<F<21 Jcm − 2的能量范围内，在空气中对Al 2 O3陶瓷进行了微结构化，观察到的烧蚀率为25<V<900μm3/pulse。在这个超短脉冲长度下，阈值通量为Fth=1.1Jcm− 2。使用超快光脉冲可以最大限度地减少熔化，提高边缘质量。通过优化工艺参数，残余表面粗糙度可以降低到原始表面Ra=0.8μm以下。产生的碎屑主要由单晶氧化铝纳米颗粒组成，直径从20 nm到1μm，平均直径为300 nm。
Al2O3ceramic has been micro-structured in air using 180fs, λ=775nm optical pulses in a fluence range 1.4<F<21Jcm−2with observed ablation rates of 25<V<900μm3/pulse. The threshold fluence was Fth=1.1Jcm−2at this ultrashort pulse-length in the NIR. Melting could be minimised using ultrafast optical pulses, improving the edge quality. By optimising the processing parameters, the residual surface roughness could be reduced below the pristine surface Ra=0.8μm. The debris produced consists mainly of single crystal nanoparticles of alumina with diameters from 20nm to 1μm with an average diameter of 300nm.