Characterization of Electrostatic Force for Scanning Electrostatic Force Microscopy of Micro-structured Surface
Characterization of Electrostatic Force for Scanning Electrostatic Force Microscopy of Micro-structured Surface
复制标题
微结构表面扫描静电力显微镜的静电力表征
DOI：
10.1007/s12541-013-0208-6
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发表时间：
2013
影响因子：
1.9
通讯作者：
Wei Gao
中科院分区：
文献类型：
--
作者：
Zhigang Jia;So Ito;Keiichiro Hosobuchi;Shigeaki Goto;Yuki Shimizu;Gaofa He;Wei Gao
本文介绍了一种用于非接触条件下表面轮廓测量的扫描静电力显微镜（SEFM）原型系统的静电力特性。在SEFM系统中，采用双高度法，通过消除电场分布对样品表面的影响，可以准确地获得探针尖端与样品表面之间的距离。由于探针尖与样品表面之间的电容对静电力的影响很大，提出了一种利用有限差分法（FDM）对任意形状探针尖与随机形貌样品表面之间的电容分布进行建模和表征的新方法。将FDM方法计算的静电力与传统球平面模型计算的静电力进行比较，验证了FDM方法的有效性。并将实验测得的频移值与FDM法计算的仿真结果进行了比较。结果表明，利用FDM可以很好地计算任意形状的探针尖与样品表面之间的静电力。
This paper presents the electrostatic force characterization of a prototype scanning electrostatic force microscope (SEFM) system developed for surface profile measurement in noncontact condition. In the SEFM system, with applying a dual height method, the distance between the probe tip and the sample surface can be accurately obtained by removing the influence of the electric field distribution on the sample surface. Since the electrostatic force is greatly influenced by the capacitance between the probe tip and the sample surface, a new approach for modeling and characterization of the distribution of capacitance between the probe tip with an arbitrary shape and the sample surface with a random topography by using the finite difference method (FDM) is proposed. The electrostatic forces calculated by the FDM method and the conventional sphere-plane model are compared to verify the validity of the FDM method. The frequency shift values measured by the experiment are also compared with the simulation results calculated by the FDM method. It has been demonstrated that the electrostatic force between arbitrary shapes of the probe tip and the sample surface can be well calculated by the FDM.