LTPS TFT Process on Polyimide Substrate for Flexible AMOLED
LTPS TFT Process on Polyimide Substrate for Flexible AMOLED
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DOI：
10.1109/jdt.2015.2419656
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发表时间：
2015-08-01
影响因子：
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通讯作者：
Huang, Xiuqi
中科院分区：
文献类型：
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作者：
Gao, Xiaoyu;Lin, Li;Huang, Xiuqi
对于传统的有源矩阵有机发光二极管（AMOLED）平板显示器，刚性玻璃基板工艺上的低温多晶硅薄膜晶体管（LTPS TFT）已经很好地建立。然而，该技术不能直接应用于柔性显示器的聚酰亚胺（PI）基板上。这是因为PI具有与玻璃不同的热膨胀系数（CTE），这将在常规LTPS-TFT工艺技术下导致PI膜剥离和/或翘曲问题。本文讨论了一种用于柔性显示的PI基板上的LTPS TFT的工艺流程。通过优化LTPS TFT工艺，成功制作了柔性显示演示系统。
For conventional active-matrix organic light-emitting diode (AMOLED) flat panel displays, low temperature poly-silicon thin-film transistor (LTPS TFT) on rigid glass substrate process has already been well established. However, this technology cannot be applied directly on polyimide (PI) substrate for flexible display. This is because PI has the different coefficient of thermal expansion (CTE) from the glass, which will result in PI film peeling-off and/or warpage issues under conventional LTPS-TFT process technology. In this paper, a process flow of LTPS TFT on PI substrate for flexible display application was discussed. A flexible display demo system was successfully made by optimizing the LTPS TFT process.