Determination of irradiation parameters for laser-induced periodic surface structures
Determination of irradiation parameters for laser-induced periodic surface structures
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DOI：
10.1016/j.apsusc.2012.09.120
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发表时间：
2013-01-01
影响因子：
6.7
通讯作者：
In't Veld, A. J. Huis
中科院分区：
文献类型：
--
作者：
Eichstadt, J.;Romer, G. R. B. E.;In't Veld, A. J. Huis
在横向位移条件下，用线性偏振皮秒激光脉冲（波长 lambda = 1030 nm，脉冲持续时间 tau = 6.7 ps，脉冲重复频率 f(p) = 1 kHz）照射后，单晶硅上激光诱导周期性表面结构 (LIPSS) 的空间出现进行了理论和实验研究。提出了一种实验方法，用于确定均匀覆盖 LIPSS 的扩展表面区域的辐照参数。该方法基于累积注量，由两个步骤组成，首先凭经验确定累积注量域边界，其次是辐照参数的近似。 LIPSS在表面功能化领域的应用需要这种方法。该方法成功应用于构造扩展的表面积，这些表面积被 LIPSS 均匀覆盖。通过不同辐照参数组合获得的满足累积注量边界条件的区域显示出相同类型的LIPSS。这一观察结果证明，累积注量对 LIPSS 的空间出现具有决定性作用。将来，需要进一步的实验来验证所应用的近似值的有效性和边界。 (C) 2012 Elsevier B.V. 保留所有权利。
The spatial emergence of laser-induced periodic surface structures (LIPSS) on single-crystalline silicon, upon irradiation with linearly polarized picosecond laser pulses (wavelength lambda = 1030 nm, pulse duration tau = 6.7 ps, pulse repetition frequency f(p) = 1 kHz) was studied theoretically and experimentally, under lateral displacement conditions. An experimental approach is presented for the determination of irradiation parameters of extended surface areas homogenously covered with LIPSS. The approach is based on accumulated fluence and consists of two steps, first the empirical determination of accumulated fluence domain boundaries and second the approximation of irradiation parameters. Such an approach is required for the application of LIPSS in the field of surface functionalization. The approach was successfully applied for structuring extended surface areas, which were homogenously covered with LIPSS. The areas, obtained by different irradiation parameter combinations, satisfying accumulated fluence boundary conditions, show the same type of LIPSS. This observation provides evidence, that the accumulated fluence has a decisive role in the spatial emergence of LIPSS. In the future, further experiments are required to verify the validity and boundaries of the approximations applied. (C) 2012 Elsevier B.V. All rights reserved.