Stress and wavefront measurement of large-aperture optical components with a ptychographical iterative engine
Stress and wavefront measurement of large-aperture optical components with a ptychographical iterative engine
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使用叠印迭代引擎测量大孔径光学元件的应力和波前
DOI：
10.1364/ao.464317
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发表时间：
2022
期刊：
影响因子：
1.9
通讯作者：
Jianqiang Zhu
中科院分区：
文献类型：
--
作者：
Xiaomeng Sun;Xuejie Zhang;Zhigang Liu;Quantang fan;Cheng Liu;Jianqiang Zhu
大口径光学元件的夹紧应力对系统的光学质量有很大影响。在这项研究中，我们开发了一套综合测量系统，该系统结合了光刻迭代引擎(PIE)波前传感器和偏振元件，以确定光学元件的应力分布及其对透射波前的影响。该系统避免了多台测量仪器的使用，成本低，抗干扰性强。实验结果表明，在不同分辨率下测得的应力分布与有限元分析结果一致，波前测量精度为0.1λ。这种测试配置非常灵活，为大口径光学系统的在线安装和质量控制提供了一种有用的手段。
The clamping stress of large-aperture optical elements has a significant influence on the optical quality of the system. In this study, a comprehensive measurement system combined with ptychographical iterative engine (PIE) wavefront sensors and polarization components is developed to determine the stress distribution of the optical elements and its effect on the transmitted and reflected wavefronts. This system avoids the use of multiple measuring instruments and has low cost and strong anti-interference ability. The experimental results demonstrate that the stress distributions measured at different resolutions are consistent with the finite element analysis, and the wavefront measurement accuracy is 0.1 λ . This test configuration is very flexible and provides a useful means for online installation and quality control of large-aperture optical systems.