Design optimization of active scanning probe using parallel link mechanism
Design optimization of active scanning probe using parallel link mechanism
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DOI：
10.1007/s12541-012-0182-4
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发表时间：
2012-07
影响因子：
1.9
通讯作者：
T. Harada;Ke Dong;Tomoyuki Itoigawa
中科院分区：
文献类型：
--
作者：
T. Harada;Ke Dong;Tomoyuki Itoigawa
提出了一种基于平移并联机构（TPM）的三自由度主动扫描探针。本研究提出的TPM采用小的触控力控制，可以作为坐标测量的探测装置，工作在几立方毫米的区域内。本文介绍了TPM的机理特点、设计优化、原型设计和精度。在本文提出的优化TPM设计中，机构在各个方向上的可操纵性是相等的。这意味着TPM的位置灵敏度具有各向同性关系。在边长为1.6 mm的立方工作范围内，机构的位置分辨率小于1.0 μm。介绍了采用该设计的实验机构。为了评估TPM的精度，我们开发了一个利用图像处理技术测量TPM位置的实验系统。通过机械参数校准，将TPM的绝对位置精度提高到3.4 μm。
A 3-dof active scanning probe using a translational parallel mechanism (TPM) is proposed. The TPM proposed in this study employs a small touching force control and can be used as a probing device for coordinate measurement, working within an area of a few cubic millimeters. In this paper, the characteristics of the mechanism, optimization of design, prototyping, and accuracy of the TPM are introduced. In the proposed optimization TPM design, the manipulability of the mechanism is equal in all directions. This implies that the positional sensitivities of the TPM share an isotropic relationship. The positional resolution of the mechanism becomes less than 1.0 μm in a cubic working range with side length of 1.6 mm. An experimental mechanism using the proposed design is introduced. In order to evaluate the accuracy of the TPM, we have developed an experimental system for the measurement of the position of the TPM using image processing. By applying mechanical parameters calibration, the accuracy of the absolute position of the TPM has been improved to 3.4 μm.