Measurement of strain and strain relaxation in free-standing Si membranes by convergent beam electron diffraction and finite element method
Measurement of strain and strain relaxation in free-standing Si membranes by convergent beam electron diffraction and finite element method
复制标题
通过会聚束电子衍射和有限元法测量自支撑硅膜的应变和应变弛豫
作者：
H.Gao;K.Ikeda;S.Hata;H.Nakashima;D.Wang;H.Nakashima
