Active Micro-Actuators for Optical Modulation Based on a Planar Sliding Triboelectric Nanogenerator
Active Micro-Actuators for Optical Modulation Based on a Planar Sliding Triboelectric Nanogenerator
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基于平面滑动摩擦纳米发电机的光调制主动微执行器
DOI：
10.1002/adma.201404291
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发表时间：
2015-01-27
影响因子：
29.4
通讯作者：
Wang, Zhong Lin
中科院分区：
文献类型：
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作者：
Zhang, Chi;Tang, Wei;Wang, Zhong Lin
DOI：10.1002/adma. 201404291中所述的两种光致发光器件由平面滑动TENG驱动，并且它们的光方向和光功率可以由外部机械能调制。基于这种TENG的主动微致动器可以为独立和可持续的自供电MEMS/NEMS的更重要的潜在应用开辟道路。平面滑动TENG的基本结构由独立式摩擦电层和两对正交电极组成，如图1a中示意性所示。对于平面滑动TENG装置的制造，Al和聚四氟乙烯（PTFE），具有很大的差异，在摩擦电极性，分别被选为导电膜和独立的摩擦电层。将两个矩形Al膜（每个定制为7 cm× 14 cm）并排沉积在底部丙烯酸基板上，在它们之间的X方向上具有0.1cm的间隙，并且它们用作底部电极。将两个相同尺寸的矩形Al膜并排沉积在顶部丙烯酸基板上，这次在它们之间在Y方向上具有0.1cm的间隙，并且它们用作顶部电极。然后将两个7 cm× 7 cm的正方形PTFE膜粘附在相同尺寸的支撑丙烯酸基板的两侧，并使每个膜与顶部或底部电极紧密接触。为了进一步提高摩擦电荷密度，两个PTFE膜的表面都通过电感耦合等离子体（ICP）处理以产生纳米颗粒结构，如图1 B所示。在平面力的驱动下，独立的PTFE层可以在上下电极之间的平面内滑动，通过该电极提供双通道输出电压。
DOI: 10.1002/adma. 201404291 were driven by the planar sliding TENG and their optical direction and power could be modulated by the external mechanical energy. The active micro-actuators based on this TENG could open up the road to more important potential applications of independent and sustainable self-powered MEMS/NEMS. The basic structure of the planar sliding TENG is composed of a freestanding triboelectric-layer and two pairs of orthogonal electrodes, as schematically illustrated in Figure 1a. For the fabrication of the planar sliding TENG device, Al and polytetrafluoroethylene (PTFE), with a large difference in triboelectric polarity, were selected as the conducting film and the freestanding triboelectric layer, respectively. Two rectangular Al films, each tailored to 7 cm× 14 cm, were deposited side by side on the bottom acrylic substrate with a 0.1 cm gap in the X direction in between them, and they served as the bottom electrodes. Two more rectangular Al films of the same size were deposited side by side on the top acrylic substrate, this time with a 0.1 cm gap in the Y direction in between them, and they served as the top electrodes. Two square PTFE films, each tailored to 7 cm× 7 cm, were then adhered on both sides of the supporting acrylic substrate of the same size and each was brought into close contact with either the top or bottom electrode.In order to further improve the triboelectric charge density, the surface of both PTFE films was treated by inductively coupled plasma (ICP) to create nanoparticle structures, as shown in Figure 1 b. Driven by a planar force, the freestanding PTFE layer could slide in the plane between the top and bottom electrodes, through which dual-channel output voltages were supplied.