A Highly Efficient Microwave Plasma Jet Based on Evanescent-Mode Cavity Resonator Technology
A Highly Efficient Microwave Plasma Jet Based on Evanescent-Mode Cavity Resonator Technology
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DOI：
10.1109/tps.2022.3202509
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发表时间：
2022-10
影响因子：
1.5
通讯作者：
A. Semnani;K. S. Kabir
中科院分区：
文献类型：
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作者：
A. Semnani;K. S. Kabir
介绍了一种新型的低功率、高效率的大气压微波等离子体射流。具体地，穿过高Q$倏逝模（伊娃）空腔谐振器的临界间隙区域的毛细管提供受控的气体流速以实现微波气体击穿和等离子体射流形成，即使具有毫瓦范围的输入功率。介绍了等离子体射流技术的理论、模拟、制造和表征。一个2.45 GHz的原型设备可以在低至400 mW的功率下工作，功率效率>80%，并在1至7 slpm的氦气流速下提供高达6 mm长的等离子体射流，电子密度在10 ^{15}$ cm $^{-3}$的范围内。考虑到其高等离子体密度以及低操作功率和射流温度，该设备是一个可行的和安全的解决方案，用于广泛的应用，包括新兴的等离子体医学需求。
This article introduces a novel low-power and highly efficient atmospheric pressure microwave plasma jet (APPJ). Specifically, a capillary tube passing through the critical gap area of a high- $Q$ evanescent-mode (EVA) cavity resonator provides a controlled gas flow rate to realize microwave gas breakdown and plasma jet formation even with milliwatts range input power. The theory, simulation, fabrication, and characterization of the introduced plasma jet technology are discussed. A prototype 2.45 GHz device can operate at powers as low as 400 mW with >80% power efficiency and provides up to a 6-mm-long plasma jet with electron density in the range of $10^{15}$ cm $^{-3}$ in a 1 to 7 slpm helium flow rate. Considering its high plasma density as well as low operating power and jet temperature, this device is a viable and safe solution for a wide range of applications, including emerging plasma medicine needs.