Theoretical Study of Path Adaptability Based on Surface Form Error Distribution in Fluid Jet Polishing

Theoretical Study of Path Adaptability Based on Surface Form Error Distribution in Fluid Jet Polishing
复制标题

DOI:
10.3390/app8101814
复制
发表时间:
2018-10
期刊:
影响因子:
--
通讯作者:
Yanjun Han;Lei Zhang;Cheng Fan;Wule Zhu;A. Beaucamp
Yanjun Han;Lei Zhang;Cheng Fan;Wule Zhu;A. Beaucamp
中科院分区:
--
文献类型:
--
作者:
Yanjun Han;Lei Zhang;Cheng Fan;Wule Zhu;A. Beaucamp

文献摘要

被引文献

相似文献

在计算机控制光学表面成形(CCOS)技术中,面形误差的收敛与面形误差的分布、停留时间的计算、刀具影响函数(TIF)和路径规划等有着密切的关系。表面形状误差的分布直接反映了在随后的校正抛光中跨待抛光表面的体材料去除深度的差异。本文在排除实际抛光过程中的干扰因素的基础上,通过仿真实验,深入研究了路径间距和大块材料去除深度对残余误差的影响。根据残余误差的关键评价参数(均方根(RMS)和峰谷(PV))之间的关系,分别用RMS图和PV图对路径间距和大块材料去除深度进行了数学表征。提出了一种基于面形误差分布的变螺距路径自规划策略,以优化剩余误差分布。在该策略中,根据所得到的路径间距优化模型,通过对路径间距的微调来补偿由于表面形状误差分布引起的不同块体材料去除深度对残余误差的影响。仿真实验结果表明,本文提出的残差优化策略能够在不影响收敛速度的前提下,显著优化全局残差分布。优化后得到的抛光表面各子区域的残余误差分布比未优化前更加均匀,且几乎不受母面形状误差分布的影响。
In the technology of computer-controlled optical surfacing (CCOS), the convergence of surface form error has a close relationship with the distribution of surface form error, the calculation of dwell time, tool influence function (TIF) and path planning. The distribution of surface form error directly reflects the difference in bulk material removal depth across a to-be-polished surface in subsequent corrective polishing. In this paper, the effect of path spacing and bulk material removal depth on the residual error have been deeply investigated based on basic simulation experiments excluding the interference factors in the actual polishing process. With the relationship among the critical evaluation parameters of the residual error (root-mean-square (RMS) and peak-to-valley (PV)), the path spacing and bulk material removal depth are mathematically characterized by the proposed RMS and PV maps, respectively. Moreover, a variable pitch path self-planning strategy based on the distribution of surface form error is proposed to optimize the residual error distribution. In the proposed strategy, the influence of different bulk material removal depths caused by the distribution of surface form error on residual error is compensated by fine adjustment of the path spacing according to the obtained path spacing optimization models. The simulated experimental results demonstrate that the residual error optimization strategy proposed in this paper can significantly optimize the overall residual error distribution without compromising the convergence speed. The optimized residual error distribution obtained in sub-regions of the polished surface is more uniform than that without optimization and is almost unaffected by the distribution of parent surface form error.