Investigation of physical properties of quartz after focused ion beam bombardment
Investigation of physical properties of quartz after focused ion beam bombardment
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DOI：
10.1007/s00340-005-1746-0
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发表时间：
2005-04-01
影响因子：
2.1
通讯作者：
Bryan, NKA
中科院分区：
文献类型：
--
作者：
Fu, YQ;Bryan, NKA
光学性能（透射率和折射率）和相变（从非晶到晶体）的一种常用的玻璃，石英，进行了研究之前和之后的聚焦离子束（FIB）轰击离子能量从30至50千电子伏。我们发现FIB轰击对石英晶体在可见光和近红外波段的光学性质和化学结构有不同的影响。石英仍然可以用于传统光学应用的红外波长。作为一个应用实例，利用FIB铣削技术在石英衬底上直接制作了衍射光学元件阵列。实验测得的衍射效率为83.5%，满足实际应用的要求。
Optical properties (transmission and refractive index) and phase change (from amorphous to crystal) of a commonly used glass, quartz, were investigated before and after focused ion beam (FIB) bombardment with ion energy from 30 to 50 keV. We found different influences of FIB bombardment on the optical properties and chemical structure of the quartz in the wavelength region of visible and near infrared, respectively. The quartz still can be used in the infrared wavelength for conventional optical applications. As an application example, an array of diffractive optical elements (DOEs) was directly fabricated on the quartz by the FIB milling. The measured diffraction efficiency of the DOEs is 83.5%, which is acceptable for practical use.