The quantitative analysis of thin specimens:: a review of progress from the Cliff-Lorimer to the new ζ-factor methods
The quantitative analysis of thin specimens:: a review of progress from the Cliff-Lorimer to the new ζ-factor methods
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DOI：
10.1111/j.1365-2818.2006.01549.x
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发表时间：
2006-02-01
影响因子：
2
通讯作者：
Williams, DB
中科院分区：
文献类型：
--
作者：
Watanabe, M;Williams, DB
提出了一种新的定量薄膜X射线分析方法--zeta因子法。这种新的zeta因子方法克服了传统的Cliff-Lorimer定量方法的两个主要局限性：（1）使用纯元素而不是多元素，薄样品标准和（2）内置的X射线吸收校正，同时厚度测定。与通用、标准、薄试样相结合。可以估计覆盖元素周期表的大部分的一系列ζ因子。该zeta因子估计还可以提供关于检测器效率和显微镜-检测器接口系统两者的信息。由于内置的吸收校正，轻元素分析也可以更容易地进行。此外，新的zeta因子的方法有几个优势，因为在各个分析点的试样厚度的信息同时产生的Cliff-Lorimer比方法，从而允许同时测定的空间分辨率和分析灵敏度在这项工作中。详细的zeta因子的方法，以及它如何改善的克利夫-洛里默的方法进行了演示，沿着与几个应用程序。
A new quantitative thin-film X-ray analysis procedure termed the zeta-factor method is proposed. This new zeta-factor method overcomes the two major limitations of the conventional Cliff-Lorimer method for quantification: (1) use of pure-element rather than multielement, thin-specimen standards and (2) built-in X-ray absorption correction with simultaneous thickness determination. Combined with a universal, standard, thin specimen. a series of zeta-factors covering a significant fraction of the periodic table can be estimated. This zeta-factor estimation can also provide information about both the detector efficiency and the micro scope-detector interface system. Light-element analysis can also be performed more easily because of the built-in absorption correction. Additionally, the new zeta-factor method has several advantages over the Cliff-Lorimer ratio method because information on the specimen thickness at the individual analysis points is produced simultaneously with compositions, thus permitting concurrent determination of the spatial resolution and the analytical sensitivity In this Work. details of the zeta-factor method and how it improves on the Cliff-Lorimer approach are demonstrated, along With several applications.