Probe location checker for IC physical verification
Probe location checker for IC physical verification
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DOI：
10.1109/tencon.2017.8227951
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发表时间：
2017-11
期刊：
影响因子：
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通讯作者：
Infall Syafalni;K. Wakasugi;Tsutomu Sasao
中科院分区：
文献类型：
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作者：
Infall Syafalni;K. Wakasugi;Tsutomu Sasao
在IC制造中，IC的复制需要在提高质量和成本方面做出一些努力。本文重点讨论用于 IC 复制的探针位置检查器，特别是当技术转换为不同的技术时。在这项工作中，我们利用指纹检测中使用的点集注册方法来实现探针检查器。实验结果表明，错位的探针可以在一秒内被检测出来。此外，我们将该方法应用于0.35μm工业IC的转换。所提出的方法有助于减少物理验证时间。
In IC manufacturing, the reproduction of an IC requires some efforts on improving the quality and the cost. This paper focuses on the probe location checker for IC reproduction, especially when the technology is converted to a different one. In this work, we implement probe checker by utilizing a point set registration method used in finger print detection. Experimental results show that the dislocated probe can be detected within a second. Moreover, we applied the method to 0.35μm industrial ICs conversion. The proposed method is useful to reduce physical verification time.