Power dissipation mode transition by a magnetic field
Power dissipation mode transition by a magnetic field
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DOI：
10.1063/1.1506944
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发表时间：
2002-09
影响因子：
4
通讯作者：
S. You;C. Chung;K. Bai;Hong-young Chang
中科院分区：
文献类型：
--
作者：
S. You;C. Chung;K. Bai;Hong-young Chang
我们测量了低压（10 mTorr）下横向磁化电容耦合等离子体的电学特性。从这些测量中，我们发现，磁化放电的功率特性不同于那些未磁化的放电。随着磁场的增加，高电流下功率特性的平方依赖性变为线性依赖性。这可以被理解为通过磁场的功率耗散模式转变。从一个简单的鞘层模型的计算与实验数据符合得很好。
We measured electrical characteristics of transversely magnetized capacitively coupled plasma at low pressure (10 mTorr). From these measurements, we found that the power characteristics of the magnetized discharge were different from those of the unmagnetized discharge. As the magnetic field increases, a square dependence of power characteristic at high current changes to a linear dependence. This can be understood as a power dissipation mode transition by a magnetic field. A calculation from a simple sheath model agrees well with the experimental data.