Microfabrication of a scanning probe with NV centers in a selectively grown diamond thin film through a xenon difluoride etching process
Microfabrication of a scanning probe with NV centers in a selectively grown diamond thin film through a xenon difluoride etching process
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DOI：
10.1088/1361-6439/aa8f12
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发表时间：
2017-10
影响因子：
2.3
通讯作者：
Minjie Zhu;Jinhua Li;M. Toda;T. Ono
中科院分区：
文献类型：
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作者：
Minjie Zhu;Jinhua Li;M. Toda;T. Ono
通过标准微/纳米机电系统工艺制造了金刚石薄膜中具有氮空位（NV）中心的扫描探针。通过微波等离子体增强化学气相沉积在部分成核的硅表面上选择性地生长金刚石薄膜。 NV 中心在金刚石生长过程中嵌入，纯氮气流流入生长室。通过光致发光测量证实了金刚石薄膜中 NV 中心的存在。此外，我们发现二氟化氙（XeF2）蚀刻工艺和退火处理对金刚石中NV中心的存在有影响。所制作的金刚石薄膜中具有NV中心的扫描探针可用作磁扫描传感器。预期选择性生长金刚石薄膜的替代方法可在不同的应用中提供各种金刚石结构。
A scanning probe with nitrogen vacancy (NV) centers in diamond thin film was fabricated via a standard micro/nano electromechanical system process. The diamond thin film was selectively grown by microwave plasma enhanced chemical vapor deposition on a partially nucleated silicon surface. NV centers are embedded during the diamond growth with a pure nitrogen gas flow to the growth chamber. The existence of NV centers in the diamond thin film was confirmed by photoluminescence measurements. In addition, we found that a xenon difluoride (XeF2) etching process and anneal treatment have an influence on the existence of NV centers in the diamond. The fabricated scanning probe with NV centers in diamond thin film can be used as a magnetic scanning sensor. It is anticipated that the alternative method of selectively growing diamond thin film provides various diamond structures in diverse applications.