An ultrahigh resolution pressure sensor based on percolative metal nanoparticle arrays
An ultrahigh resolution pressure sensor based on percolative metal nanoparticle arrays
复制标题
基于渗流金属纳米颗粒阵列的超高分辨率压力传感器
DOI：
10.1038/s41467-019-12030-x
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发表时间：
2019-09-06
影响因子：
16.6
通讯作者：
Han, Min
中科院分区：
文献类型：
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作者：
Chen, Minrui;Luo, Weifeng;Han, Min
纳米颗粒阵列之间的隧穿电导对纳米颗粒的间距非常敏感，可以用于制作超灵敏传感器。这样的传感器对于各种应用，例如汽车系统和消费电子产品，具有极其重要的意义。在这里，我们代表了一个敏感的压力传感器，它是由一个压阻应变传感器制成的紧密间隔的纳米粒子薄膜沉积在一个灵活的膜。得益于这种独特的量子输运机制，传感器的热噪声显著降低，为我们的器件提供了作为高性能压力传感器的机会，其分辨率约为0.5 Pa，灵敏度为0.13 kPa−1。此外，我们的传感器具有前所未有的响应能力，可以作为气压高度计操作，高度分辨率约为1米。我们的器件的出色性能使纳米颗粒阵列用作压力测量的驱动材料。
Tunneling conductance among nanoparticle arrays is extremely sensitive to the spacing of nanoparticles and might be applied to fabricate ultra-sensitive sensors. Such sensors are of paramount significance for various application, such as automotive systems and consumer electronics. Here, we represent a sensitive pressure sensor which is composed of a piezoresistive strain transducer fabricated from closely spaced nanoparticle films deposited on a flexible membrane. Benefited from this unique quantum transport mechanism, the thermal noise of the sensor decreases significantly, providing the opportunity for our devices to serve as high-performance pressure sensors with an ultrahigh resolution as fine as about 0.5 Pa and a high sensitivity of 0.13 kPa−1. Moreover, our sensor with such an unprecedented response capability can be operated as a barometric altimeter with an altitude resolution of about 1 m. The outstanding behaviors of our devices make nanoparticle arrays for use as actuation materials for pressure measurement.