Three-dimensional piezoelectric MEMS actuator by using sputtering deposition of Pb(Zr,Ti)O3 on microstructure sidewalls
Three-dimensional piezoelectric MEMS actuator by using sputtering deposition of Pb(Zr,Ti)O3 on microstructure sidewalls
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DOI：
10.1088/1361-665x/aa61eb
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发表时间：
2017-03
影响因子：
4.1
通讯作者：
K. Kanda;Shingo Moriue;T. Fujita;K. Maenaka
中科院分区：
文献类型：
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作者：
K. Kanda;Shingo Moriue;T. Fujita;K. Maenaka
为了实现具有多自由度的压电微机电系统（MEMS），在预刻蚀衬底的侧壁上沉积并微图案化锆钛酸铅薄膜，其特征深度为几百微米。压电测试结构，包括凹的几何形状和垂直和倾斜的侧壁的悬臂梁被成功地制造到4英寸的全尺寸的晶片上。锆钛酸铅薄膜的基本性质的表征表明值相媲美的那些沉积在平坦的基板上。驱动试验表明，三角形柱杠杆可以在平面内和离面驱动。将钛酸铅薄膜沉积在垂直侧壁上，在水平方向上形成由压电/非压电/压电结构组成的双压电晶片。使用微加工技术在预蚀刻衬底上存款钛酸铅薄膜，使得MEMS致动器具有多个自由度和批处理兼容性。
For the realization of piezoelectric microelectromechanical systems (MEMS) with multiple degrees-of-freedom, lead zirconate titanate thin films were deposited and micropatterned on the sidewalls of a pre-etched substrate with a feature depth of several hundred micrometers. The piezoelectric test structures, consisting of concave geometries and cantilevers with vertical and sloped sidewalls were successfully fabricated onto a 4 inch full sized wafer. Characterization of the fundamental properties of the lead zirconate titanate thin films indicated values comparable to those deposited on flat substrates. Actuation tests demonstrated that the triangular column cantilevers can be driven both in-plane and out-of-plane. The deposition of lead zironate titanate thin films onto a vertical sidewall created bimorph cantilevers composed of piezo/non-piezo/piezo structures in the horizontal direction. The use of microfabrication techniques to deposit lead zironate titanate thin films on pre-etched substrates gives MEMS actuators with multiple degrees-of-freedom and batch process compatibility.