Waveguide and guided-wave devices consisting of heterostructured photonic crystals
Waveguide and guided-wave devices consisting of heterostructured photonic crystals
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由异质结构光子晶体组成的波导和导波器件
DOI：
10.1117/12.475539
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发表时间：
2002
期刊：
影响因子：
--
通讯作者：
H. Ohkubo
中科院分区：
文献类型：
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作者：
S. Kawakami;Takashi Sato;K. Miura;Y. Ohtera;T. Kawashima;H. Ohkubo
我们报告了基于光子晶体的光学器件的产业化战略：我们首先回顾了无源光子晶体元件的需求。虽然它们具有卓越的性能，但同时也存在着与光纤实际耦合困难、传输损耗较大等严峻的困难。本文提出了一种利用自克隆制备的异质结构光子晶体来满足这一要求的方法。一个低损耗，结构简单的波导和复杂的功能块（如谐振器）可以通过一个简单的过程集成。我们首先用电子束光刻和干式蚀刻制备了一种有图案和波纹的衬底。在衬底上反复沉积Ta2O5/SiO2多层膜，无需其他工艺即可完成芯片。经过切割和抛光后，波导可以与光纤对接，损耗估计为1.3 dB/mm。并给出了一个Q = 270的谐振腔。并对该技术的发展前景进行了展望。
We report a strategy of industrialization of photonic-crystal based optical devices: We first review requirements for passive photonic crystal components. Although they have remarkable properties, they have at the same time severe difficulties such as difficulty of practical coupling to/from optical fibers and a relatively large propagation loss. This paper present an approach of meeting the requirements using heterostructured photonic crystals fabricated by autocloning. A low-loss, simple structured waveguide and sophisticated functional blocks (such as a resonator) can be integrated by a simple process. We first prepare a substrate patterned and corrugated by electron beam lithography and dry etching. Ta2O5/SiO2 mutilayers are repeatedly deposited on the substrate, and no other process is needed to complete the chip. After dicing and polishing, the waveguide can be butt-jointed with an optical fiber and the loss is estimated as 1.3 dB/mm. A resonator with Q = 270 is also demonstrated. Future outlooks of the technology are also discussed.