Gas Behavior in the Vacuum Chamber with a Single Adsorption Site on the Wall Surface: Origin of the Exponential Pressure Decay with the Time Constant of Sub-Kilo Seconds

Gas Behavior in the Vacuum Chamber with a Single Adsorption Site on the Wall Surface: Origin of the Exponential Pressure Decay with the Time Constant of Sub-Kilo Seconds
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壁表面具有单一吸附位点的真空室内的气体行为:亚千秒时间常数的指数压力衰减的起源

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发表时间:
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期刊:
J. Vac. Soc. Jpn.
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通讯作者:
Kotaro TAKEYASU and Katsuyuki FUKUTANI
Kotaro TAKEYASU and Katsuyuki FUKUTANI
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文献类型:
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作者:
Toshiki SUGIMOTO;Kotaro TAKEYASU and Katsuyuki FUKUTANI

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