The AIM Photonics MPW: A Highly Accessible Cutting Edge Technology for Rapid Prototyping of Photonic Integrated Circuits
The AIM Photonics MPW: A Highly Accessible Cutting Edge Technology for Rapid Prototyping of Photonic Integrated Circuits
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DOI：
10.1109/jstqe.2019.2935698
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发表时间：
2019-09-01
影响因子：
4.9
通讯作者：
Coolbaugh, Douglas D.
中科院分区：
文献类型：
--
作者：
Fahrenkopf, Nicholas M.;McDonough, Colin;Coolbaugh, Douglas D.
硅光子学被认为是许多高科技领域的先驱，但获得高质量技术的途径仅限于垂直集成的设计/制造公司，或拥有大量资源从事大批量制造的无厂房公司。最近，研发中心开发并发布了工艺设计工具包和多项目晶圆计划，以降低门槛。我们推出了第一个在最先进的300 mm制造设施中生产的硅光子学多项目晶片(MPW)服务。MPW服务是通过一流的工艺设计套件(PDK)实现的，该套件允许设计人员在第一次运行时即可正确工作的光子集成电路(PIC)的布局和获得。这些电路的制造是在纽约州立大学理工学院进行的，该研究所运营着一个世界级的300 mm洁净室，除了硅光子学之外，该研究所还开发亚7 nm的CMOS架构。该工厂及其设备的工业级管理提供了高质量的光子器件，这些器件可从运行到运行重复，并具有快速的周转时间。设计者可通过工艺设计套件获得的器件由Analog Photonics生产，并已在实际运行中得到验证。这些器件的性能可与最先进的器件相媲美，可实现多种硅光子应用。
Silicon photonics has been heralded for a number of high technology fields, but access to a high quality technology has been limited to vertically integrated design/fabrication companies, or fabless companies with significant resources to engage high volume fabs. More recently, research and development hubs have developed and released process design kits and multi-project wafer programs to lower the barrier. We present the first silicon photonics multi-project wafer (MPW) service produced in a state-of-the-art 300 mm fabrication facility. The MPW service is enabled by a best-in-class process design kit (PDK) which allows designers to layout and obtain photonic integrated circuits (PICs) that work properly on the first run. The fabrication of these circuits is carried out at the SUNY Polytechnic Institute which operates a world class 300 mm cleanroom that, besides silicon photonics, develops sub-7 nm CMOS architectures. The industrial-level management of this facility and its equipment provides high quality photonic devices which are repeatable from run-to-run along with rapid turnaround time. The devices that are available to designers via the process design kit are produced by Analog Photonics and have been verified on actual runs. The performance of these devices is comparable to the state-of-the-art and enables a wide variety of silicon photonic applications.