Review Nano and macro-structured component fabrication by electron beam-physical vapor deposition (EB-PVD)
Review Nano and macro-structured component fabrication by electron beam-physical vapor deposition (EB-PVD)
复制标题
DOI：
10.1007/s10853-005-5682-5
复制
发表时间：
2005
影响因子：
4.5
通讯作者：
Jogender Singh;D. Wolfe
中科院分区：
文献类型：
--
作者：
Jogender Singh;D. Wolfe
本文的目的是展示电子束-物理气相沉积(EB-PVD)技术在可控微结构和微化学涂层形式的新材料工程中的通用性。人们正在探索EB-PVD技术，以形成用于空间、涡轮、光学、生物医学和汽车工业等许多应用的网状部件。在包括热、腐蚀、磨损和氧化在内的恶劣环境条件下，通常在部件上涂覆涂层以延长其性能和寿命。此外，涂层还被用于设计和开发传感器。涂层的性能和性能取决于涂层的组成、微观结构和沉积条件。本文介绍了EB-PVD制备的各种材料的最新结果，包括陶瓷、金属和功能梯度涂层。在高能EB-PVD反应腔中同时蒸发不同成分的多个铸锭，引起了人们对传统方法不能经济地生产的功能梯度涂层的结构、纳米层状涂层的结构以及新型结构材料设计的极大兴趣。此外，较高的蒸发和冷凝速率使得可以制造各种用途的具有纳米晶微结构的精密网状部件。本文还将介绍各种金属和陶瓷涂层的结果，包括铬、碳化钛(TiC)、碳化汞(HFC)、碳化钽(TAC)、氮化汞(HFN)、钛硼碳氮化物(TiBCN)和部分氧化钇稳定的氧化锆(YSZ)，以及用于各种应用的HfO2基TBC涂层。
The objective of this paper is to demonstrate the versatility of electron beam-physical vapor deposition (EB-PVD) technology in engineering new materials with controlled microstructure and microchemistry in the form of coatings. EB-PVD technology is being explored in forming net-shaped components for many applications including space, turbine, optical, biomedical and auto industry. Coatings are often applied on components to extend their performance and life under severe environmental conditions including thermal, corrosion, wear, and oxidation. In addition, coatings have been used in designing and developing sensors. Performance and properties of the coatings depend upon its composition, microstructure and deposition condition. This paper presents recent results of various materials including ceramic, metallic, and functionally graded coatings produced by EB-PVD. Simultaneous co-evaporation of multiple ingots of different compositions in the high energy EB-PVD chamber has brought considerable interest in the architecture of functional graded coatings, nano-laminated coatings and designing of new structural materials that could not be produced economically by conventional methods. In addition, high evaporation and condensate rate allowed fabricating precision net-shaped components with nanograined microstructure for various applications. This paper will also present the results of various metallic and ceramic coatings including chromium, titanium carbide (TiC), hafnium carbide (HfC), tantalum carbide (TaC), hafnium nitride (HfN), titanium-boron-carbonitride (TiBCN), and partially yttria stabilized zirconia (YSZ), and HfO2-based TBC coatings deposited by EB-PVD for various applications.