A hybrid method for lattice image reconstruction and deformation analysis
A hybrid method for lattice image reconstruction and deformation analysis
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DOI：
10.1088/1361-6528/ac780f
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发表时间：
2022-06
期刊：
影响因子：
3.5
通讯作者：
Hongye Zhang;Run Peng;H. Wen;H. Xie;Zhanwei Liu
中科院分区：
文献类型：
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作者：
Hongye Zhang;Run Peng;H. Wen;H. Xie;Zhanwei Liu
几何相位分析（GPA）是研究纳米尺度测量中形变的有力工具，特别是在处理高分辨率透射电子显微镜图像方面。传统的基于快速傅里叶变换的GPA方法是建立在位移和相位差之间的关系上的。本文首次提出了一种基于实空间点阵图像处理的纳米网格方法，实现了纳米尺度界面平整度的测量，以及不同成分的厚度测量。在此基础上，提出了一种网格图像重建与变形分析相结合的方法。该混合方法能够同时进行实空间和频域处理，从而在测量具有大变形或包含裂纹的样品时补偿GPA方法的缺点，同时保持其测量精度。
Geometric phase analysis (GPA) is a powerful tool to investigate the deformation in nanoscale measurement, especially in dealing with high-resolution transmission electron microscopy images. The traditional GPA method using the fast Fourier transform is built on the relationship between the displacement and the phase difference. In this paper, a nano-grid method based on real-space lattice image processing was firstly proposed to enable the measurement of nanoscale interface flatness, and the thickness of different components. Then, a hybrid method for lattice image reconstruction and deformation analysis was developed. The hybrid method enables simultaneous real-space and frequency-domain processing, thus, compensating for the shortcomings of the GPA method when measuring samples with large deformations or containing cracks while retaining its measurement accuracy.