Characteristics of flexible indium tin oxide electrode grown by continuous roll-to-roll sputtering process for flexible organic solar cells
Characteristics of flexible indium tin oxide electrode grown by continuous roll-to-roll sputtering process for flexible organic solar cells
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DOI：
10.1016/j.solmat.2009.01.015
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发表时间：
2009-08-01
影响因子：
6.9
通讯作者：
Kim, Han-Ki
中科院分区：
文献类型：
--
作者：
Choi, Kwang-Hyuk;Jeong, Jin-A;Kim, Han-Ki
介绍了采用特殊设计的卷对卷溅射系统在聚对苯二甲酸乙二醇酯（PET）衬底上生长的柔性氧化铟锡（ITO）电极的制备及其特性。结果发现，在连续辊对辊溅射工艺中，柔性ITO电极的电学和光学性质都严重依赖于Ar/O-2流量比。尽管衬底温度低（
The preparation and characteristics of flexible indium tin oxide (ITO) electrodes grown on polyethylene terephthalate (PET) substrates using a specially designed roll-to-roll sputtering system for use in flexible organic solar cells are described. It was found that both electrical and optical properties of the flexible ITO electrode were critically dependent on the Ar/O-2 flow ratio in the continuous roll-to-roll sputter process. In spite of the low substrate temperature (