On the Field Evaporation Behavior of Dielectric Materials in Three-Dimensional Atom Probe: A Numeric Simulation
On the Field Evaporation Behavior of Dielectric Materials in Three-Dimensional Atom Probe: A Numeric Simulation
复制标题
三维原子探针中介电材料场蒸发行为的数值模拟
DOI：
10.1017/s1431927610093888
复制
发表时间：
2010
影响因子：
2.8
通讯作者：
G. Schmitz
中科院分区：
文献类型：
--
作者：
C. Oberdorfer;G. Schmitz
摘要激光辅助原子探针（laser-assisted atom probe, la - 3dp）的建立，拓宽了三维原子探针的应用范围。同时，对电介质、陶瓷和半导体等低电导率材料的测量也得到了广泛的证实。然而，除了不同的蒸发概率外，非均匀介电性质预计会在该方法所基于的三维体积重建中产生额外的伪影。在这篇文章中，这些可能的伪影是基于场蒸发的数值模拟来讨论的。考虑了层状或沉淀型几何形状的样品尖端。结果表明，在临界蒸发场降低的情况下，介电材料的行为与金属相似。
Abstract As a major improvement in three-dimensional (3D) atom probe, the range of applicable material classes has recently been broadened by the establishment of laser-assisted atom probes (LA-3DAP). Meanwhile, measurements of materials of low conductivity, such as dielectrics, ceramics, and semiconductors, have widely been demonstrated. However, besides different evaporation probabilities, heterogeneous dielectric properties are expected to give rise to additional artifacts in the 3D volume reconstruction on which the method is based. In this article, these conceivable artifacts are discussed based on a numeric simulation of the field evaporation. Sample tips of layer- or precipitate-type geometry are considered. It is demonstrated that dielectric materials tend to behave similarly to metals of reduced critical evaporation field.