Mueller polarimetry in the back focal plane

Mueller polarimetry in the back focal plane
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后焦平面的穆勒偏振测量

DOI:
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发表时间:
2007
期刊:
SPIE Advanced Lithography
影响因子:
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通讯作者:
M. Foldyna
M. Foldyna
中科院分区:
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文献类型:
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作者:
A. de Martino;S. Ben Hatit;M. Foldyna

文献摘要

被引文献

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提出了一种基于液晶和显微物镜的新型米勒偏振仪,用于测量圆锥衍射装置中衍射光栅的特性。在极角(0-56°)和方位角(0-360°)范围内实现了完整Mueller矩阵的快速测量,而无需机械运动。偏振态发生器和偏振态分析器使用了可调延迟器。角度范围是通过使用具有高数值孔径的显微镜物镜将光聚焦在被测样品上并将物镜后傅立叶平面成像在CCD上来实现的。各向同性样品和衍射光栅的结果。
A new Mueller polarimeter based on liquid crystals and a microscope objective is presented, for the characterization of diffraction gratings in a conical diffraction mounting. Fast measurements of complete Mueller matrices over a range of polar angles (0-56°) and azimuthal angles (0-360°) are achieved without mechanical movements. The polarization state generator and analyzer make use of nematic variable retarders. The angular range is achieved through focalization of light over the measured sample with a microscope objective with a high numerical aperture and imaging of the objective back Fourier plane on a CCD. Results on isotropic samples and diffraction gratings are shown.