Threshold Pressure Sensing Using Parametric Resonance in Electrostatic MEMS
Threshold Pressure Sensing Using Parametric Resonance in Electrostatic MEMS
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DOI：
10.1109/sensors43011.2019.8956679
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发表时间：
2019-10
期刊：
影响因子：
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通讯作者：
M. Hasan;Mark Pallay;Shahrzad Towfighian
中科院分区：
文献类型：
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作者：
M. Hasan;Mark Pallay;Shahrzad Towfighian
这项研究阐明了利用静电悬浮机构的参数共振进行阈值压力传感的概念。静电悬浮允许在与衬底相反的方向上振荡，从而不限于小间隙。压力传感器通过触发具有显著峰峰值变化(~25μm)的参数谐振来检测低于阈值的压力降。这种检测依赖于这样一个事实，即当压降迫使振幅向上跳跃到更高的振荡分支时，不稳定区域扩大。谐振器幅度的这种显著变化可能与指示阈值压力的大电容变化有关。建立了谐振器的数学模型，通过频率响应描述了传感器的工作原理。我们的实验结果表明，传感器检测到的阈值压力可以通过它接收到的交流电压来调整。
This study illustrates the concept of threshold pressure sensing using the parametric resonance of an electrostatic levitation mechanism. The electrostatic levitation allows the oscillations in the opposite direction of the substrate, thereby not limited to small gaps. The pressure sensor detects the pressure drop below a threshold value by triggering the parametric resonance with significant peak to peak dynamic amplitude changes (~ 25 μm). This detection relies on the fact that the instability region expands when the pressure drop forces the amplitude jump up to the higher oscillation branch. This significant change in the resonator amplitude can be related to a large capacitance variation indicating the threshold pressure. A mathematical model of the resonator is presented to show the working principle of the sensor through frequency response. Our experimental results show that the threshold pressure the sensor detects, can be adjusted by the AC voltage it receives.