The energy spectra of secondary ions emitted during ion bombardment
The energy spectra of secondary ions emitted during ion bombardment
复制标题
离子轰击过程中发射的二次离子的能谱
DOI：
10.1080/00337577708233145
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发表时间：
1977
期刊：
影响因子：
--
通讯作者：
R. J. Macdonald
中科院分区：
文献类型：
--
作者：
A. Bayly;R. J. Macdonald
摘要对43 keV A+辐照靶发射的单电荷离子的二次离子能谱进行了测量。研究对象包括三维过渡金属（Sc, Ti， V, Cr, Fe, Ni） Cu和Zn， Zr， Al和Si以及化合物SiO2， Al2O3, NaCl, KCl。测量了1 ~ 600 eV能量范围内的能谱。在一些情况下，在200 eV附近的区域发现了能谱峰。这是除了通常在5-10 eV区域的低能峰之外的。在许多情况下，观察到低能峰随辐照时间稳定衰减或随氧压增加。在最干净的Zn光谱中，只能检测到高能量峰。这些数据与目前的二次离子发射模型进行了讨论。我们得出结论，一般来说，清洁的元素金属靶在二次离子能谱中具有高能量峰的特征。发出的较慢的离子被电子交换过程中和了。…
Abstract Secondary ion energy spectra have been measured for singly charged ions emitted from targets irradiated with 43 keV A+ ions. Targets studied include the 3d transition metals (Sc, Ti, V, Cr, Fe, Ni) Cu and Zn, Zr, Al and Si and the compounds SiO2, Al2O3, NaCl, KCl. Energy spectra were measured in the energy range 1–600 eV. In several cases a peak in the energy spectrum in the region around 200 eV has been found. This is in addition to the usual low energy peaks in the region of 5–10 eV. In many cases the low energy peak was observed to decay steadily with irradiation time or to increase with oxygen pressure. In the case of the cleanest Zn spectrum, only the high energy peak can be detected. The data are discussed in relation to current models of secondary ion emission. We conclude that, in general, elemental metal targets which are clean are characterised by the high energy peak in the secondary ion energy spectrum. The slower ions emitted have been neutralised by electron exchange processes. The ...